• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    Method and interferometric device (1) for spectroscopic or spectrometric examination of a sample, preferably in the infrared spectral range, comprising the steps of: a) generating a laser beam (3) having a wavelength preferably in the infrared spectral range, b) dividing the Laser beam (3) in a measuring beam (6) and a reference beam (7), c) interaction of the sample with the measuring beam (6), d) interaction of a reference with the reference beam (7), e) superimposing the measuring beam (6) and the reference beam (7) such that in each case a first output beam (18) and a second output beam (19) are obtained whose phases are shifted by 180 ° from each other, f) detecting the first output beam (18), g) detecting the second output beam (19), h) forming a difference signal (28) between the first output beam (18) and the second output beam (19), i) regulating the difference signal (28) to a predetermined desired value (30) Adjusting a phase difference between the measuring beam (6) and the reference beam (7), j) determining a refractive index (n) of the sample from the adjustment of the phase difference between the measuring beam (6) and the reference beam (7), k) repeating the Steps a) to j) for further wavelengths of the laser beam (3), preferably in the infrared spectral range for detecting a spectrum of the refractive index (n) of the sample.
    公开号:AT520258A1
    申请号:T50623/2017
    申请日:2017-07-26
    公开日:2019-02-15
    发明作者:
    申请人:Univ Wien Tech；
    IPC主号:
    专利说明:

    The invention relates to a method for spectroscopic or
    spectrometric examination of a sample, preferably in the infrared spectral range.
    The invention further relates to an interferometric device for the spectroscopic examination of a liquid sample, preferably in the infrared spectral range, comprising:
    a tunable laser for emitting a laser beam, preferably in the infrared spectral range,
    a beam splitting element for splitting the laser beam into a measuring beam and a reference beam,
    a measuring chamber for the interaction between the sample and the measuring beam,
    a reference chamber for the interaction between a reference and the reference beam,
    - A beam combining element with a first output for the interferometric superimposition of the measuring beam and the reference beam as the first output beam and with a second output for the interferometric superimposition of the measuring beam and the reference beam as the second output beam, the first output beam and the second output beam being 180 ° in phase distinguish from each other,
    a first detector for detecting the first output beam,
    a second detector for detecting the second output beam,
    - A phase actuator for setting a phase between the measuring beam and the reference beam.
    Such an interferometer is in particular from EP 2 738
    543 A2 known. As a result, spectroscopic investigations in the infrared spectral range (IR) in an aqueous environment are only possible to a very limited extent due to the high absorption of water in the infrared spectral range. However, most of the characteristic absorption bands of many organic groups are in the infrared spectral range. In order to eliminate the disadvantages of known spectroscopy methods, such as FTIR spectroscopy or ATR spectroscopy, / 24, EP 2 738 543 A2 proposes a rigid interferometer with the same optical path lengths for the measurement and reference beam, which should provide a background-free optical measurement. Here, the interferometer can be set for complete destructive interference in the absence of the analyte in the measuring cell. In the next step, the analyte can be introduced, whereby a small difference signal is obtained. Spectroscopy using the differential measurement method should lead to a significantly better signal-to-noise ratio compared to conventional spectrometers. In the prior art, by using the coherence of a tunable laser source through destructive interference, a background-free measurement is thus made possible, which suppresses the intensive underground absorption of the water by optical means.
    This approach was also presented in the abstract “A QCL-based MachZehnder interferometer for chemical sensing, Jakob Hayden et al., As part of the FLAIR 2016 conference.
    In practice it has been shown that the suppression of the background signal works satisfactorily. However, a closer mathematical investigation has shown that the sensitivity of the destructively superimposed useful signal is low. For small concentrations of the analyte, the sensitivity goes to zero. For this reason, a variety of measures were considered as to how the sensitivity can be increased in the present measurement setup. For example, the intensity of the reference beam can be increased compared to the measuring beam, for example by using beam splitters with different division ratios. Alternatively, the transmission path in the measuring cell can be selected differently in relation to the reference cell. With these measures, the measurement accuracy can be increased; however, there is still room for improvement.
    Accordingly, the object of the present invention is to alleviate or eliminate the disadvantages of the prior art. The invention aims in particular at qualitative and quantitative investigations, in particular of liquid ones
    Perform samples with high sensitivity.
    This object is achieved by a method with the features of claim 1 and an interferometric device with the features of claim 3.
    The method according to the invention for the spectroscopic or spectrometric examination of a sample in the infrared spectral range has at least the following steps:
    a) generating a laser beam with a wavelength preferably in the infrared spectral range,
    b) splitting the laser beam into a measuring beam and a reference beam,
    c) interaction of the sample with the measuring beam,
    d) interaction of a reference with the reference beam,
    e) interferometric superimposition of the measuring beam and the reference beam in such a way that a first output beam and a second output beam are obtained, the phases of which are shifted by 180 ° relative to one another,
    f) detecting the first output beam,
    g) detecting the second output beam,
    h) formation of a difference signal between the first output beam and the second output beam,
    i) regulating the difference signal to a predetermined desired value by setting a phase difference between the measuring beam and the reference beam,
    j) determining a refractive index of the sample from the adjustment of the phase difference between the measuring beam and the reference beam,
    k) repeating steps a) to j) for further wavelengths of the laser beam, preferably in the infrared spectral range, in order to acquire a spectrum of the refractive index of the sample.
    The interferometric device of the type mentioned is characterized by
    a difference image to form a difference signal between the first output beam and the second output 4/24 output beam
    - A control unit, which is set up to regulate the difference signal by means of the phase actuator to a predetermined target value and to tune the wavelength of the laser beam in order to determine a spectrum of the refractive index of the sample from a position of the phase actuator as a function of the wavelength of the laser beam.
    The embodiment according to the invention therefore means a departure from the known approach of wanting to eliminate the background signal of the liquid sample by measuring the destructively superimposed signal. In contrast, in the invention, a difference signal is formed from the first output beam and the second output beam, the second output beam being 180 ° out of phase with the first output beam. The difference signal is regulated by adjusting a phase control element for each wavelength of the wavelength range to be examined in order to achieve the predetermined target value. When the sample is changed (depending on the wavelength), a corresponding shift in the signals of the first and second output beams is achieved, which results in a deviation of the actual value of the difference signal from the target value. This deviation is compensated for by the phase actuator, the change in the state of the phase actuator being recorded. The set phase shift on the phase actuator correlates with the refractive index (or with the refractive index difference between the reference and the liquid sample). A spectrum of the refractive index is obtained by tuning the laser beam, which in turn depends on the concentration of the analyte in the liquid sample. Accordingly, the detection of the spectrum of the refractive index allows both qualitative and quantitative investigations of the liquid sample. The simultaneous detection of the first output beam and the second output beam and the subsequent formation of differences also compensate for fluctuations in intensity of the laser light source, which leads to a more stable measurement.
    / 24
    A laser beam with a wavelength of 200 nanometers (nm) to 25 micrometers (μm) is preferably used to carry out measurements in the ultraviolet spectral range and / or in the visible spectral range and / or in the near infrared range (NIR) and / or in the middle infrared range (MIR) , The method is particularly preferably carried out in the NIR range with a wavelength of 0.75 μm to 2.5 μm and / or in the MIR range with a wavelength of more than essentially 2.5 μm.
    In a first preferred application, the sample consists of a matrix and an analyte, the reference consists exclusively of the matrix. Depending on the application, the matrix is in particular a liquid solvent, preferably water.
    In an alternative preferred embodiment, the reference is a solid.
    The solid can preferably be selected from the following group: SiO 2 , SiN, YF 3 , TiO 2 , Al 2 O 3 , HfO 2 , Si, ZnSe, ZnS, CaF 2 , MgF 2 , BaF 2 , GaAs, AgX (one Mixture of AgCl and AgBr), C (as diamond or DLC "diamond like carbon"), chalchalides (such as Te-Ge-I) and chemical compounds from one or more chalcogen elements (oxygen, sulfur, selenium or tellurium) as formal anions with metals or more electropositive elements (arsenic, germanium, phosphorus, antimony, lead, boron, aluminum, gallium, indium, titanium, sodium, cadmium) as formal cations (typical examples that have been used as IR materials: Ge33% As12 % Se55%, Ge30% As13% Se32% Te25%, Ge28% Sb12% Se60%, As40% Se60%). In many cases, these materials can be structured easily and are essentially transparent in the spectral range of interest.
    According to a particularly preferred embodiment variant, the difference signal between the first output beam and the second output beam is regulated to the setpoint zero. This version is particularly suitable for increasing the sensitivity of the measurement. The increase in sensitivity results from the fact that the nominal value zero of the difference signal / 24 corresponds to a relative phase position of the first and second output beams of + 90 ° and -90 ° overlapping at the output of the interferometric device. The phase angle of 90 ° refers to the overlapping beams from the sample and reference beam paths. For the first output beam the phase between sample and reference beam is + 90 °, for the second output beam -90 °. The difference in the superposition in the two output beams (which each consist of two superimposing partial beams) is therefore always 180 °. With this relative phase position, the change in the intensities measured at the detectors as a function of the position of the phase actuator is maximal, which enables a particularly precise adjustment of the phase actuator.
    In an integrated version of the interferometer, an input light waveguide for the laser beam, a measurement beam light waveguide for the measurement beam and a reference beam light waveguide for the reference beam are preferably provided. The input, measurement beam and reference beam waveguide are preferably arranged on a die (i.e. a semiconductor wafer). A chip with an integrated interferometer is basically known from “On-Chip Integrated Mid-Infrared GaAs / AlGaAs Mach-Zehnder Interferometer, Markus Sieger et al., Analytical Chemistry 2013 85 (6), 3050-3052. In contrast to the interferometer presented there, the arrangement described here has a phase control element which influences the relative phase position of the partial beams during the superimposition and thus enables the above-described regulation of a difference signal to a specific value.
    For the required interaction between the sample and the measurement beam on the one hand and between the reference and the reference beam on the other hand, the measurement chamber preferably has a first microfluid channel adjacent to the measurement beam light waveguide and / or the reference chamber has a second microfluid channel adjacent to the reference beam light waveguide. The interaction takes place via the evanescent field of the measuring or Reference beam that falls exponentially from the light
    Waveguide protrudes into the adjacent medium, i.e. the sample or the reference.
    As an alternative to using a microfluid channel for the reference chamber, the reference beam waveguide can also be covered with a solid layer. The thickness of the solid layer formed on the reference beam waveguide is preferably greater than three times the penetration depth of the evanescent field, so that no interaction with a sample can take place. The solid of the solid layer preferably has an essentially constant absorption and dispersion over time.
    With regard to a structurally simple design of the integrated interferometer, it is advantageous if the phase actuator has a heating element, in particular a resistance heating element, for the measuring beam light waveguide or. for the reference beam light waveguide. The heating element is preferably located in the immediate vicinity of the measuring beam light waveguide. By changing the temperature, the effective refractive index of the (measuring beam) light waveguide and thus the phase of the guided light is changed. The heating element is connected to a controllable power source, which is set by the control unit. The manipulated variable is a measure of the refractive index of the sample and is recorded while the wavelength of the laser is being tuned and the control unit regulates the difference signal to the target value.
    For coupling the laser light or for superimposing the measuring beam and the reference beam, it is advantageous if the beam splitting element has a 1x2 coupler and the beam combining element has a 2x2 coupler. The 2x2 coupler brings the reference beam and the measuring beam into interference and, depending on their relative phase position, directs the interfering beams into one or the other output waveguide. Such a coupler can be, for example, a multimode interference coupler (MMI coupler). Seen in the beam direction after the 2x2 coupler, the two output beams are detected. A first and a second output coupler / 24 can be provided for this purpose, which direct the beams to the first and second detector, respectively.
    In an alternative embodiment of the interferometer, the measuring chamber is designed as a first flow cell in the beam path of the measuring beam and the reference chamber as a second flow cell in the beam path of the reference beam. In this version, the first flow cell is irradiated by the measuring beam. The second flow cell is irradiated by the reference beam.
    In a further embodiment, a solid absorber is provided instead of the second flow cell.
    In order to achieve a phase shift for the regulation of the difference signal between the first and second detector, it is particularly favorable if the phase actuator has a mirror and a piezo actuator for adjusting the mirror.
    In this embodiment it is furthermore favorable if the beam splitting element has a first beam splitter and the beam combining element has a second beam splitter.
    The invention is explained in more detail below on the basis of preferred exemplary embodiments in the drawings.
    1 shows a first preferred embodiment of an interferometric device for examining a liquid sample.
    2 schematically shows the signals of a first detector for a first output beam and a second detector for a second output beam, each as a function of the position of a phase actuator.
    3 schematically shows a difference signal between the signals of the first and second detectors.
    4 schematically shows the spectrum of the refractive index (bottom) / 24 or the absorption (top) of the sample.
    5 shows an interferometric device according to a second preferred embodiment.
    1 schematically shows an interferometric device 1 for the spectroscopic examination of a liquid sample in the infrared spectral range. The interferometric device 1 has a tunable laser 2 for emitting a laser beam 3 in the infrared spectral range. A diode laser such as e.g. a lead salt laser, but also a semiconductor laser of another type such as a quantum cascade laser (QCL, "Quantum Cascade Laser) or an interband cascade laser (ICL," Interband Cascade Laser) can be provided. For the measurement of gases and liquids, thermally tunable DFB QCL ("Distributed Feedback Quantum Cascade Laser) or DFB ICL (" Distributed Feedback Interband Cascade Laser) are advantageous because of their line sharpness.
    However, EC QCL (“External Cavity Quantum Cascade Laser”) or EC ICL (“External Cavity Intraband Cascade Laser”), which can be tuned widely, but also or several DFB lasers are particularly advantageous for measuring liquids. Depending on the measurement requirements, at least one laser, but possibly also several lasers, can be used.
    In the embodiment shown, the interferometric device 1 has a Mach-Zehnder interferometer; however, other types of interferometers, for example a Michelson interferometer, can also be provided. The interferometric device 1 has a beam splitting element 4, here a conventional beam splitter 5, for splitting the laser beam 3 into a measuring beam 6 and a reference beam 7. In addition, a measuring chamber 8 for the interaction between the sample and the measuring beam 6 and a reference chamber 9 for the interaction between a reference and the reference beam 7 are provided. The sample has an analyte which, in the embodiment shown, is contained in another substance or mixture of substances, the matrix; the reference consists of the matrix or a suitable solid absorber. Substances dissolved in water, such as sugar, proteins, organic acids, alcohols and the like, can be provided as analytes, for example. It is also possible with this measuring technique to measure substances such as fatty acid methyl esters, mineral oil hydrocarbons and the like, which are dissolved in apolar solvents. It is also possible to measure substances which do not themselves show any absorption in the infrared spectral range, but which change the spectrum of the respective solvent due to their presence. This is e.g. the case when ions are present dissolved in water. In the case of gases, small molecules such as NO and the like, but also larger molecules such as VOCs (“volatile organic compounds”) can be analyzed in air, breathing air or in various types of process streams.
    1, the measuring chamber is designed as a first flow cell 10 in the beam path of the measuring beam 6. The sample is fed to the first flow cell 10 via an inflow 11 and, after flowing through the flow cell 10, discharged via an outflow 12. Correspondingly, the reference chamber 9 is designed as a second flow cell 13, which is arranged in the beam path of the reference beam 7. The second flow cell 13 can be designed corresponding to the first flow cell 10.
    In the embodiment shown, the interferometric device 1 also has a fixed mirror element 14 for deflecting the measurement beam 6, here by essentially 90 °, between the beam splitter 5 and the measurement chamber 8 and a mirror 15 for deflecting the reference beam 7, here by essentially 90 °, in the beam direction after the reference chamber 9.
    In addition, the interferometric device 1 has a beam combining element 16 for superimposing the measuring beam 6 and the reference beam 7. In this embodiment variant, the beam combination element 16 can be designed like that of EP 2 738 543. In the embodiment of FIG. 1, a further beam splitter 17 is therefore designed as a beam combining element 16. The / 24
    Beam combining element 16 has a first output, at which measuring beam 6 and reference beam 7 emerge as first output beam 18. At a second output of the beam combining element 16, the measuring beam 6 and the reference beam 7 emerge as a second output beam 19, which has a phase shift of 180 ° with respect to the first output beam. A first (IR) detector 20 is provided for detecting the first output beam 18. The constructively superimposed output beam 19 is detected on a second (IR) detector 21.
    In an alternative embodiment, the beam combining element 16 and the beam splitting element 4 can be formed by a uniform beam splitting and combining element, for example when using a Michelson interferometer (not shown).
    Furthermore, a phase actuator 22 for achieving a phase shift, i.e. a change in the phase difference between the measuring beam 6 and the reference beam 7 is provided. In the embodiment shown, the phase actuator has a piezo actuator 23 for adjusting the mirror 15 in the direction of the arrow 24. For this purpose, the piezo actuator 23 is connected to a controllable voltage source 25 in a manner known per se.
    In the embodiment shown, the signals of the first detector 20 and the second detector 21 are first fed to a device 26 for signal processing and demodulation. The processed signals are transferred to a difference image 27, with which a difference signal 28 is generated between the first output beam 18 and the second output beam 16. If the intensity measured on the detectors shows a strong dependence on the wavelength of the laser beam, the difference signal can still be normalized to this, e.g. by normalizing the difference to the sum of the signals. This can increase the stability of the control and thus the sensitivity of the refractive index measurement. The (normalized) difference signal 28 is used as an input signal for a control unit 29, with which the difference signal 28 is regulated by setting the phase actuator 22 to a predetermined setpoint 30. Accordingly, the position of the phase actuator 22 is changed by the control unit 29 for each wavelength of the laser 2 in the IR interval to be examined in such a way that the desired setpoint 30, preferably zero, is obtained. The position of the phase actuator as a function of the wavelength of the laser beam is stored in a memory 35 so as to record a spectrum of the refractive index of the sample.
    Fig. 2 shows on the one hand the (normalized) signal of the first detector 20 for the first output beam 18 (solid line 31) and on the other hand the (standardized) signal of the second detector 21 for the second output beam 19 (dashed line 32), each in dependence from the phase (in degrees) of the phase actuator 22 (x-axis). As a result, the signals 31, 32 are shifted from one another by 180 °. 2, the signals are shown for the case that the sample and reference are identical. By introducing an analyte into the sample, the signals 31 and 32 are equally shifted along the x-axis. With the aid of the previously explained control unit 16, the difference signal shown in FIG. 3 from the signal 31 for the first output beam 18 and the signal 32 for the second output beam 19 is adjusted to the setpoint zero.
    As can be seen from FIG. 3, the difference signal 28 disappears at a phase of 90 °, the control unit 16 being set to this target value. In addition, the difference signal has the greatest slope in this phase, as a result of which, by measuring the difference signal 28, the value on the x-axis and thus the refractive index can be measured with maximum accuracy using the control described.
    4 schematically shows a spectrum 33 of the refractive index n of the sample as a function of the wave numbers k (below). The wavelength-dependent refractive index is directly proportional to the actuating signal for the phase actuator 22, which is recorded when the laser 2 is tuned. Furthermore, a spectrum 34 of the absorption A of the sample is shown in FIG. 4. The refractive index spectrum 33 of the analyte in the sample is linked to the absorption spectrum 34 via the Kramers-Kronig relationships. It shows characteristic changes at those wavelengths at which absorption bands occur. These changes scale, in solutions of the analyte in a solvent or matrix (carrier material), with the concentration of the analyte. The measurement of the refractive index spectrum 33 therefore allows qualitative and quantitative determinations. Furthermore, the absorption can be measured with the interferometric device 1. The two spectra can subsequently be used together for the evaluation. For example, the measurement can be carried out as in EP 2 738 543 A2 (in this case the value of the normalized difference signal would be -1 or +1) or by first blocking the sample beam after or before the refractive index measurement, analogously to a conventional transmission measurement, and then the reference beam and the sum of the detector signals are recorded. This would be a classic, non-interferometric absorption measurement. Then the absorption is obtained by dividing the two signals and logarithmizing.
    5 shows an alternative embodiment of the interferometric device 1, the same reference numbers being used below for (functionally) identical elements.
    In this embodiment, a die, hereinafter referred to as chip 36, is provided. An input coupler 37 is accommodated on the chip 36, with which the laser beam of the laser 2 is coupled into an input optical waveguide 38. By means of a suitable 1x2 coupler 39, the laser beam is divided, preferably in equal parts, into a measuring beam light waveguide 40 and a reference beam light waveguide 41. The sample is passed along a first microfluidic channel 42 with an inflow 43 and an outflow 44 via the measuring beam light waveguide 40. The sample interacts with the measuring beam via the evanescent field, thereby influencing its propagation speed in the measuring beam waveguide 40. The reference arm / 24 has a second microfluid channel 45, with a further inflow 46 and a further outflow 47. The sample arm and the reference arm are preferably of identical design. Subsequently, the measuring and reference beams are brought to interference in a 2x2 coupler 48 and, depending on the phase to different parts according to FIG. 2, guided to two output couplers 50 by means of waveguides 49. The intensity of the outcoupled light is measured at the first detector 20 and the second detector 21. The difference between the two detector signals is compared in the control unit 16 with the target value 30 (here zero). The control unit 30 controls the position of the phase actuator 22, which is integrated in one of the two (or both) arms of the interferometer. 5, the phase control element 22 has a resistive heating element 51 in the immediate vicinity of the measuring beam light waveguide 40. The heating element 51 is connected to a controllable current source 52, which is set by the control unit 29 in such a way that the phase shift required for achieving the desired value of the differential signal is achieved.
    权利要求:
    Claims (10)
    [1]
    claims:
    1. Method for the spectroscopic or spectrometric examination of a sample, preferably in the infrared spectral range, with the steps:
    a) generating a laser beam (3) with a wavelength in the preferably infrared spectral range,
    b) splitting the laser beam (3) into a measuring beam (6) and a reference beam (7),
    c) interaction of the sample with the measuring beam (6),
    d) interaction of a reference with the reference beam (7),
    e) superimposing the measurement beam (6) and the reference beam (7) in such a way that a first output beam (18) and a second output beam (19) are obtained, the phases of which are shifted from one another by 180 °,
    f) detecting the first output beam (18),
    g) detecting the second output beam (19), characterized by
    h) formation of a difference signal (28) between the first output beam (18) and the second output beam (19),
    i) regulating the difference signal (28) to a predetermined target value (30) by setting a phase difference between the measuring beam (6) and the reference beam (7),
    j) determination of a refractive index (n) of the sample from the adjustment of the phase difference between the measuring beam (6) and the reference beam (7),
    k) repeating steps a) to j) for further wavelengths of the laser beam (3), preferably in the infrared spectral range, for detecting a spectrum of the refractive index (n) of the sample.
    [2]
    2. The method according to claim 1, characterized in that the difference signal (28) between the first output beam (18) and the second output beam (19) is regulated to the target value (30) zero.
    [3]
    3. Interferometric device (1) for the spectroscopic examination of a liquid sample, preferably in the infrared
    16/24
    Spectral range, comprising:
    a tunable laser (2) for emitting a laser beam (3), preferably in the infrared spectral range,
    a beam splitting element (4) for splitting the laser beam into a measuring beam (6) and a reference beam (7),
    a measuring chamber (8) for the interaction between the sample and the measuring beam (6),
    a reference chamber (9) for the interaction between a reference and the reference beam (7),
    - A beam combining element (16) with a first output for the interferometric superimposition of the measuring beam (6) and the reference beam (7) as the first output beam (18) and with a second output for the interferometric superimposition of the measuring beam (6) and the reference beam (7) as second output beam (19),
    - a first detector (20) for detecting the first output beam (18),
    - a second detector (21) for detecting the second output beam (19),
    - A phase actuator (22) for setting a phase between the measuring beam (6) and the reference beam (7), characterized by
    - A difference image (27) for forming a difference signal (28) between the first output beam (18) and the second output beam (19)
    - A control unit (16), which is set up to regulate the difference signal (28) by means of the phase actuator (22) to a predetermined target value (30) and to tune the wavelength of the laser beam (3) in order to obtain a spectrum of the refractive index (n) to determine the sample from a position of the phase actuator (22) as a function of the wavelength of the laser beam (3).
    [4]
    4. Interferometric device (1) according to claim 3, characterized in that an input light waveguide (38) for the laser beam (3), a measuring beam light waveguide (40) for the measuring beam (6) and a reference beam light waveguide (41) for
    17/24 the reference beam (7) are provided.
    [5]
    5. Interferometric device (1) according to claim 4, characterized in that the measuring chamber (8) has a first microfluid channel (42) adjacent to the measuring beam light waveguide (41) and / or that the reference chamber (9) has a second microfluid channel (45) adjacent to the reference beam light waveguide (41).
    [6]
    6. Interferometric device (1) according to claim 4 or 5, characterized in that the phase actuator (22) has a heating element (51), in particular a resistance heating element, for the measuring beam light waveguide (40) or for the reference beam light waveguide (41).
    [7]
    7. Interferometric device (1) according to one of claims 4 to 6, characterized in that the beam splitting element (4) has a 1x2 coupler (39) and the beam combining element (16) has a 2x2 coupler (48).
    [8]
    8. Interferometric device (1) according to claim 3, characterized in that the measuring chamber (8) as the first flow cell (10) in the beam path of the measuring beam (6) and the reference chamber (9) as the second flow cell (13) in the beam path of the reference beam ( 7) is executed.
    [9]
    9. Interferometric device (1) according to claim 8, characterized in that the phase actuator (22) has a mirror (15) and a piezo actuator (23) for adjusting the mirror (15).
    [10]
    10. Interferometric device (1) according to claim 8 or 9, characterized in that the beam splitting element (4) has a first beam splitter (5) and the beam combining element (16) has a second beam splitter (17).
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    ATA50623/2017A|AT520258B1|2017-07-26|2017-07-26|Process for the spectroscopic or spectrometric analysis of a sample|ATA50623/2017A| AT520258B1|2017-07-26|2017-07-26|Process for the spectroscopic or spectrometric analysis of a sample|
    PCT/AT2018/060164| WO2019018870A1|2017-07-26|2018-07-26|Method for spectroscopically or spectrometrically examining a sample, and interferometric device|
    CA3070020A| CA3070020A1|2017-07-26|2018-07-26|Method for spectroscopically or spectrometrically examining a sample, and interferometric device|
    EP18752673.6A| EP3658896A1|2017-07-26|2018-07-26|Method for spectroscopically or spectrometrically examining a sample, and interferometric device|
    US16/634,075| US11243162B2|2017-07-26|2018-07-26|Method for spectroscopically or spectrometrically examining a sample, and interferometric device|
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